Bronkhorst FLOW-SMS Series User Manual

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Instruction manual
FLOW-SMS series
Surface Mount System for Digital
Mass Flow / Pressure
Meters and Controllers
Doc. no.: 9.17.057F Date: 08-10-2012
ATTENTION:
Please read this instruction manual carefully before installing and operating the instrument.
Not following the guidelines could result in personal injury and/or damage to the equipment.
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Summary of Contents

Page 1 - Meters and Controllers

Instruction manual FLOW-SMS series Surface Mount System for Digital Mass Flow / Pressure Meters and Controllers Doc. no.: 9.17.057F Date: 08-

Page 2

BRONKHORST HIGH-TECH B.V. 9.17.057 page 102.13 Description 2.13.1 Introduction FLOW‐SMSsystemsarecompactmountingrailassemblies,containing

Page 3 - Warranty

BRONKHORST HIGH-TECH B.V. ThecontrolvalveusedintheFLOW‐SMSseriesisastandard,directoperatedsolenoidvalve(normallyopenedornormallyclo

Page 4 - Table of contents

BRONKHORST HIGH-TECH B.V. ThecontrolvalveusedintheFLOW‐SMSseriesisastandard,directoperatedsolenoidvalve(normallyopenedornormallyclo

Page 5 - 1 Scope of this manual

BRONKHORST HIGH-TECH B.V. 2.13.5 Solenoid Operated shut off valves NC and NO - RemovalEnsurethatthesystemisdepressurisedbeforetakingshut

Page 6 - 2 Starting up

BRONKHORST HIGH-TECH B.V. 2.13.7 Needle Valves - RemovalEnsurethatthesystemisdepressurisedbeforetakingtheneedlevalveapart.Loosenthe4b

Page 7 - 2.6 Electrical connection

BRONKHORST HIGH-TECH B.V. 2.13.9 Pneumatic operated shut off 3/2 valves Theactuatingpressurehastobesuppliedwitha3/2wayvalve.Whenthevalv

Page 8

BRONKHORST HIGH-TECH B.V. 2.13.11 Blind/Flow plates - RemovalEnsurethatthesystemisdepressurisedbeforedismountingtheblind/flowplates.Re

Page 9 - 2.12 Supply pressure

BRONKHORST HIGH-TECH B.V. 2.14 Model key codeABFGZoutput0-5 Vdc0-10 Vdc0-20 mAdc sourcing4-20 mAdc sourcingspecifiedsetpoint0-5 Vdc0-10 Vdc0-20 mAd

Page 10 - 2.13.3 Flow modules

BRONKHORST HIGH-TECH B.V. 9.17.057 page 18 3 Basic operation 3.1 General AFLOW‐SMSinstrumentisequippedwithadigitalelectronic‘Multibus’

Page 11 - 2.13.4 Pressure modules

BRONKHORST HIGH-TECH B.V. 9.17.057 page 19 ‐testingandselfdiagnosis‐responsealarm(|setpoint‐measure|toohighfortoolongtime)‐severalco

Page 12

BRONKHORST HIGH-TECH B.V. 9.17.057 page 2 Disclaimer Eventhoughcarehasbeentakeninthepreparationandpublicationofthecontentsofthisma

Page 13 - 2.13.6 Toggle valves

BRONKHORST HIGH-TECH B.V. 9.17.057 page 20 user)3.5 Fieldbus operation InstructionsfortherangeofoptionalfieldbusinterfacesfordigitalBro

Page 14 - 2.13.7 Needle Valves

BRONKHORST HIGH-TECH B.V. 9.17.057 page 21 4 Advanced operation 4.1 Using mass flow meters/controllers on different gases or under different

Page 15 - 2.13.10 Filter modules

BRONKHORST HIGH-TECH B.V. 9.17.057 page 22 4.1.5 Maximum pressure drop Forsolenoidoperatedcontrolvalveswithsmallorificesthemaximumallowabl

Page 16 - 2.13.11 Blind/Flow plates

BRONKHORST HIGH-TECH B.V. 5 Troubleshooting and service 5.1 General Foracorrectanalysisoftheproperoperationofaflow/pressuremeterorcon

Page 17 - 2.14 Model key

BRONKHORST HIGH-TECH B.V. 9.17.057 page 24 5.3 Troubleshooting summary general Symptom Possiblecause Action Nooutputsignal Nopowersup

Page 18 - 3 Basic operation

BRONKHORST HIGH-TECH B.V. 9.17.057 page 25 5.4 Service ForcurrentinformationonBronkhorstHigh‐Techandserviceaddressespleasevisitourwebsi

Page 19

BRONKHORST HIGH-TECH B.V. 9.17.057 page 26 6 Removal and return instructions Instrumenthandlings: Purgegaslines Removeinstrumentfromlin

Page 20 - 3.5 Fieldbus operation

BRONKHORST HIGH-TECH B.V. 9.17.057 page 3 Warranty TheproductsofBronkhorstHigh‐TechB.V.arewarranteedagainstdefectsinmaterialandworkman

Page 21 - 4 Advanced operation

BRONKHORST HIGH-TECH B.V. 9.17.057 page 4 Table of contents 1 SCOPEOFTHISMANUAL...

Page 22 - 4.1.5 Maximum pressure drop

BRONKHORST HIGH-TECH B.V. 1 Scope of this manual 1.1 Introduction ThismanualcoverstheFLOW‐SMSseries,BronkhorstHigh‐Tech’slightweight,modula

Page 23 - 5.2 LED indication

BRONKHORST HIGH-TECH B.V. 2 Starting up 2.1 Check properties 9.17.057 page 6 BeforeinstallingaFLOW‐SMSsystemitisimportanttoreadthe

Page 24

BRONKHORST HIGH-TECH B.V. 2.4 Install system 9.17.057 page 7 InstalltheFLOW‐SMSassemblyinaccordancewiththedirectionsfollowingtheschemat

Page 25 -  +31 573 45 88 39

BRONKHORST HIGH-TECH B.V. 9.17.057 page 8 Whenconnectingthesystemtootherdevices(e.g.toPLC),besurethattheintegrityoftheshieldingi

Page 26

BRONKHORST HIGH-TECH B.V. 9.17.057 page 9 2.9 Purging Insystemsforusewithcorrosiveorreactivefluids,purging foratleast30minuteswith

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